0-1700C Research/Lab high-temp Tube Furnaces - Designed For Your Research/University etc

Slideway CVD system

Model：KJ-T1200-S60LK2

Description：

The slideway CVD tube furnace system is composed of a 1400°C tube furnace, a 1200°C tube furnace and a gas system. The hearth is made of high-quality high-purity alumina polycrystalline fiber. The material has good thermal insulation performance, high ref

1400℃ tube furnace part
Furnace structure	Double-layer shell structure, equipped with cold air system, automatic cooling furnace shell temperature does not exceed 50 ℃
Furnace material	High-quality high-purity alumina polycrystalline fiber solidified furnace with vacuum adsorption molding technology from Japan. The material has good thermal insulation performance, high reflectivity, and balanced temperature field.
maximum temperature	1400℃
continuous working temperature	≤1300℃
Heating rate	Recommended ≤10°C/min, the fastest heating rate is 20°C/min
Furnace tube material	Depending on the temperature of use, replace the tubes of different materials
Furnace tube size	Outer diameter: 60mm
Heating zone length	500mm
Temperature Control System	The temperature control system adopts artificial intelligence adjustment technology, with PID adjustment and self-tuning functions 1. Adopt PID method to adjust temperature control, and can set 30 heating and cooling programs 2. Temperature control accuracy ±1ºC 3. With over-temperature protection and burnout protection 4. The instrument has the function of temperature self-tuning
Heating element	High temperature silicon carbide rod
Temperature measuring element	S type thermocouple
Working power	AC220V，50Hz
rated power	5KW(subject to actual power)
sliding device	Cr-plated thick steel plate two-way slide rails can realize the movement of the tube furnace to achieve rapid heating and cooling Shared slideway with 1200℃ tube furnace
1200℃ tube furnace part
Furnace structure	Double-layer shell structure, equipped with cold air system, automatic cooling furnace shell temperature does not exceed 50 ℃
Furnace material	High-quality high-purity alumina polycrystalline fiber solidified furnace with vacuum adsorption molding technology from Japan. The material has good thermal insulation performance, high reflectivity, and balanced temperature field.
continuous working temperature	≤1100℃
Heating rate	Recommended ≤10°C/min, the fastest heating rate is 20°C/min
Furnace tube size	Φ60mm (The length is subject to the actual temperature)
Heating zone length	300mm
Temperature Control System	The temperature control system adopts artificial intelligence adjustment technology, with PID adjustment and self-tuning functions 1. Adopt PID method to adjust temperature control, and can set 30 heating and cooling programs 2. Temperature control accuracy ±1ºC 3. With over-temperature protection and burnout protection 4. The instrument has the function of temperature self-tuning
Heating element	Molybdenum alloy resistance wire
Temperature measuring element	K type thermocouple
Working power	AC220V，50/60Hz
rated power	3KW (subject to actual power)
sliding device	Cr-plated thick steel plate two-way slide rails can realize the movement of the tube furnace to achieve rapid heating and cooling Shared slideway with 1400℃ tube furnace
Flange seal	The 1400°C tube furnace and the 1200°C tube furnace share a quartz tube and slideway, the two ends of the quartz tube are sealed with stainless steel flanges, the left flange has an air inlet, and the right flange is an air outlet
Air system part
Mass flowmeter	Three-way precision mass flowmeter: digital display, automatic control of gas flow. MFC1 Range: 0-500 sccm (range optional) MFC2 range: 0-500 sccm (range optional) MFC3 range: 0-500 sccm (range optional) Air way: 3 way Flow accuracy: 0.2% Inlet and outlet ports: 1/4" ferrules Each gas path has an independent stainless steel needle valve control. The gas flow is adjusted by the knob on the control panel.
Standard configuration	1 host, 1 set of gas system, 1 set of flange, 1 piece of quartz tube, 2 pieces of furnace plug, 1 piece of crucible hook, 1 pair of high-temperature gloves, 1 copy of instruction manual, 1 copy of certificate and warranty card